 Heater | 10 - Thermal Analysis of a Radiant Heater UP! | Module:HT,TR | 2012-04-10 | Quartz heaters, which are used in semiconductor manufacturing, are a kind of heating device that uses heat radiation phenomena. Thermal radiation is a mechanism of heat transfer, which is defined as the transport of heat through the transmission of electromagnetic waves between objects that have different temperatures, making transfer possible even through a vacuum. This objective is to transfer heat to a heated body uniformly by placing it near the heater, which has been heated by running current through the coil.
It is necessary to properly handle the effects of the 3D geometry of the heated body or the heat generated from the heater in order to see whether it is raising the temperature uniformly, so a thermal analysis is carried out.
This Application Note explains how to carry out a thermal analysis using the thermal radiation phenomenon between a heater and a heated body to obtain the differences in temperature distribution in the heated body with and without a shield.
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