Mechanism Investigation and Source Improvement of Surface-wave Interfered Plasma Using JMAG WV

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Nobumasa Suzuki, Canon Inc.

Abstract

The generation mechanism of the surf ace-wave interfered plasma (SIP), in which the surf ace-wave introduced from a slot interferes with that from the adjacent slot on the window surface to excite a standing surface-wave stably, was investigated through electromagnetic-field analysis using JMAG WV.
Double-decker multi-slot antenna (DMA), which can produce an uniform surfacewave-f ie ld and plasma-generation, was developed through optimizing the structural parameters, which are the position, the direct ion and the length of the slots, and the diameter and the thickness of the dielectric window, using JMAG WV.
KEYWORDS: ULSI, surface-wave, plasma, uniformation, analysis

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